==============================================================================


                         DATA AND RESULTS FILES


INPUT FILES:
                 Focusing Conditions...............      aberd.dat
                 Magnetic lens(es).................     mlens1.axb
                 Electrostatic lens(es)............     elens1.axv
                 Main-field deflector(s)...........      mdef1.axd
                                                         mdef2.axd
                 Sub-field deflector(s)............      sdef1.axf
                                                         sdef2.axf
OUTPUT FILES:
                 Paraxial Rays.....................      aberd.ray
                 Optical Properties................      aberd.res


==============================================================================


                                TITLES


ELECTRON BEAM LITHOGRAPHY SYSTEM
 
MAGNETIC LENS FOR AN E-BEAM COLUMN (D1=110 mm, D2=80 mm, S=16 mm)
ELECTROSTATIC LENS FOR AN E-BEAM COLUMN (D1=80 mm, D2=40 mm, S=15 mm)
MAIN SADDLE YOKE 1 (L=20 mm, R1=20 mm, R2=25 mm, Turn=5, PHi=60 deg)
MAIN SADDLE YOKE 2 (L=20 mm, R1=20 mm, R2=25 mm, Turn=5, PHi=60. deg)
SUB ELECTROSTATIC OCTOPOLE DEFLECTOR 1 (L=10 mm, R=10 mm)
SUB ELECTROSTATIC OCTOPOLE DEFLECTOR 2 (L=10 mm, R=10 mm)


==============================================================================


                            INPUT DATA VALUES



 IMAGING CONDITIONS DATA:


      OBJECT PLANE .......................... Zo(mm)   =      0.0000

      FINAL IMAGE PLANE ..................... Zi(mm)   =    400.0000


      APERTURE ANGLE AT IMAGE PLANE ......... Ai(mrad) =      5.0000
      APERTURE ANGLE AT OBJECT PLANE ........ Ao(mrad) =      1.2773
      BEAM SIZE AT IMAGE PLANE ............... Bi (mm) =      0.1000
      BEAM SIZE AT OBJECT PLANE .............. Bo (mm) =      0.3199
      FIELD SIZE FOR MAIN DEFLECTION ........ M (mm)   =      3.0000
      FIELD SIZE FOR SUB  DEFLECTION ........ S (mm)   =      0.5000
      FIELD SIZE FOR TERTIARY DEFLECTION .... T (mm)   =      0.0000


      BEAM VOLTAGE AT IMAGE PLANE ........... V(Volts) =  20039.4857
      BEAM VOLTAGE RIPPLE (PEAK-PEAK) ...... DV(Volts) =      1.0000



 OPTICAL ELEMENTS DATA:

                                     AXIAL    RELATIVE  SIZE SCALE    ROTATION
                                  POSITION    STRENGTH      FACTOR       ANGLE
                                      (mm)                           (degrees)

            MAGNETIC LENS 1       320.0000      1.0000      1.0000       -

            ELECTRIC LENS 1       345.0000       -          1.0000       -

            MAG MAIN DEFL 1       180.0000      1.0000      1.0000      0.0000
            MAG MAIN DEFL 2       300.0000     10.0000      1.0000    -30.0000

            ELE SUB  DEFL 1       150.0000      1.0000      1.0000      0.0000
            ELE SUB  DEFL 2       240.0000      1.0000      1.0000      0.0000


==============================================================================


       FIELD AND DRIFT REGIONS AND NUMBER OF INTERVALS FOR COMPUTATION



 TOTAL NUMBER OF INTERVALS FOR COMPUTATION             =         200

  FIELD REGIONS:
   1: (  100.0000 mm ~   400.0000 mm) NO. OF INTERVALS =         200



==============================================================================


                         FIRST-ORDER PROPERTIES


 FOCUSING PROPERTIES:

      MAGNETIC LENS No. 1       EXCITATION  (Ampturns)   =   1261.7873



      ELECTROSTATIC LENS No. 1  ELECTRODE-1    (Volts)   =  30000.0000
                                ELECTRODE-2    (Volts)   =  20000.0000



      ANGULAR MAGNIFICATION ..........................   =     -3.9144
      MAGNIFICATION ..................................   =     -0.3126
      ROTATION ANGLE ....................    (degrees)   =     80.9406




 DEFLECTION SENSITIVITIES:

      MAIN FIELD ........................    (mm/Amp )   =      5.4832

      SUB FIELD .........................    (mm/Volt)   =      0.0038

 DEFLECTION DIRECTIONS:

      MAIN FIELD ...........................    (Deg.)   =     25.6831

      SUB FIELD ............................    (Deg.)   =     79.1806




 LANDING ANGLES AT CORNERS OF IMAGE PLANE:
                                                  RADIAL       CIRCUMF
                                               (degrees)     (degrees)


      SHAPED BEAM ........................        0.2039        0.0041

      MAIN FIELD .........................        0.9453       -0.0971

      SUB FIELD ..........................       -0.2783        0.0124



==============================================================================


        ABERRATIONS AT CORNERS OF DEFLECTION FIELD   (in microns)



                                 NORMAL         4-FOLD


 SPHERICAL ABERRATION ...................................         0.01554
 

 COMA ...................................................         0.14965

            MAIN FIELD          0.08546        0.00000
            SUB  FIELD          0.11614        0.00000
            SHAPED BEAM         0.04005           -  
 

 FIELD CURVATURE.........................................         0.91554

            MAIN FIELD          0.50764           -  
            SUB  FIELD          0.37870           -  
            SHAPED BEAM         0.04202           -  

            HYBRID M-S          0.59398           -  
            HYBRID M-B          0.16758           -  
            HYBRID S-B          0.23335           -  
 

 ASTIGMATISM.............................................         0.42535

            MAIN FIELD          0.24559        0.00000
            SUB  FIELD          0.18190        0.00000
            SHAPED BEAM         0.02062           -  

            HYBRID M-S          0.25445        0.00000
            HYBRID M-B          0.08795        0.00000
            HYBRID S-B          0.12087        0.00000
 

 DISTORTION..............................................         0.61050

            MAIN FIELD          0.18132        0.00000
            SUB  FIELD          0.16429        0.00000
            SHAPED BEAM         0.00614           -  

            HYBRID M-M-S        0.40656        0.00000
            HYBRID M-S-S        0.28534        0.00000
            HYBRID M-M-B        0.06690        0.00000
            HYBRID M-B-M        0.16258           -  
            HYBRID M-B-B        0.02714        0.00000
            HYBRID S-S-B        0.05151        0.00000
            HYBRID S-B-S        0.10972           -  
            HYBRID S-B-B        0.03806        0.00000

            HYBRID M-S-B        0.13533        0.00000
 

 CHROMATIC AB............................................         0.04089

            AXIAL               0.01733           -  

            MAIN FIELD          0.03002           -  
            SUB  FIELD          0.01919           -  
            SHAPED BEAM         0.01010           -  


------------------------------------------------------------------------------

 BEAM BLUR BEFORE DC:           1.02149        0.00000            1.02149

 BEAM BLUR AFTER  DC:           0.36247        0.00000            0.36247


==============================================================================


                ABERRATION COEFFICIENTS   (in S.I. units)



                                ISOTROPIC      ANISOTROPIC     FUNCTIONAL
                                   PART            PART        DEPENDENCE

------------------------------------------------------------------------------

 SPHERICAL ABERRATION          2.48597e-01     0.00000e+00      A  A  Ac 

------------------------------------------------------------------------------


 ***** COMA *****


 MAIN FIELD ...    NORMAL     -2.59567e-03    -7.20634e-01      A  A  Mc 
                              -5.19135e-03     1.44127e+00      A  M  Ac 

                   4-FOLD      0.00000e+00     0.00000e+00      Ac Ac Mc 


 SUB FIELD ....    NORMAL     -5.80714e+00    -8.99241e-01      A  A  Sc 
                              -1.16143e+01     1.79848e+00      A  S  Ac 

                   4-FOLD      0.00000e+00     0.00000e+00      Ac Ac Sc 


 SHAPED BEAM ..    NORMAL      1.00886e+01    -9.38288e-01      A  A  Bc 
                               2.01773e+01     1.87658e+00      A  B  Ac 


------------------------------------------------------------------------------


 ***** FIELD CURVATURE *****


 MAIN FIELD ...    NORMAL      1.12808e+01     0.00000e+00      A  M  Mc 


 SUB FIELD ....    NORMAL      3.02960e+02     0.00000e+00      A  S  Sc 


 SHAPED BEAM ..    NORMAL      8.40320e+02     0.00000e+00      A  B  Bc 


 HYBRID M-S ...    NORMAL      1.19395e+01    -3.77556e+01      A  M  Sc 
                               1.19395e+01     3.77556e+01      A  S  Mc 


 HYBRID M-B ...    NORMAL      1.23609e+01     5.44738e+01      A  M  Bc 
                               1.23609e+01    -5.44738e+01      A  B  Mc 


 HYBRID S-B ...    NORMAL     -4.51729e+02     1.17277e+02      A  S  Bc 
                              -4.51729e+02    -1.17277e+02      A  B  Sc 


------------------------------------------------------------------------------


 ***** ASTIGMATISM *****


 MAIN FIELD ...    NORMAL     -4.78266e+00    -2.62869e+00      M  M  Ac 

                   4-FOLD      0.00000e+00     0.00000e+00      Ac Mc Mc 


 SUB FIELD ....    NORMAL      1.40197e+02    -3.90099e+01      S  S  Ac 

                   4-FOLD      0.00000e+00     0.00000e+00      Ac Sc Sc 


 SHAPED BEAM ..    NORMAL      4.05059e+02     7.73370e+01      B  B  Ac 


 HYBRID M-S ...    NORMAL     -2.08420e+00    -3.38629e+01      M  S  Ac 

                   4-FOLD      0.00000e+00     0.00000e+00      Ac Mc Sc 


 HYBRID M-B ...    NORMAL     -3.05257e+00     5.85568e+01      M  B  Ac 

                   4-FOLD      0.00000e+00     0.00000e+00      Ac Mc Bc 


 HYBRID S-B ...    NORMAL     -4.82323e+02     3.36869e+01      S  B  Ac 

                   4-FOLD      0.00000e+00     0.00000e+00      Ac Sc Bc 


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 ***** DISTORTION *****


 MAIN FIELD ...    NORMAL      1.83120e+01    -5.04567e+00      M  M  Mc 

                   4-FOLD      0.00000e+00     0.00000e+00      Mc Mc Mc 


 SUB FIELD ....    NORMAL     -3.68651e+03     4.78739e+02      S  S  Sc 

                   4-FOLD      0.00000e+00     0.00000e+00      Sc Sc Sc 


 SHAPED BEAM ..    NORMAL      1.72994e+04     1.65047e+03      B  B  Bc 


 HYBRID M-S ...    NORMAL      1.13854e+02     8.50698e+01      M  M  Sc 
                              -2.12217e+02     7.98411e+00      M  S  Mc 

                              -1.94515e+02     9.17893e+02      M  S  Sc 
                              -2.58492e+02    -4.59072e+02      S  S  Mc 

                   4-FOLD      0.00000e+00     0.00000e+00      Mc Mc Sc 
                               0.00000e+00     0.00000e+00      Mc Sc Sc 


 HYBRID M-B ...    NORMAL     -1.93783e+02    -8.15266e+01      M  M  Bc 
                               5.10786e+02     1.24429e+01      M  B  Mc 

                               4.29510e+02     2.25937e+03      M  B  Bc 
                               5.29063e+02    -9.89343e+02      B  B  Mc 

                   4-FOLD      0.00000e+00     0.00000e+00      Mc Mc Bc 
                               0.00000e+00     0.00000e+00      Mc Bc Bc 


 HYBRID S-B ...    NORMAL      5.45797e+03    -2.04307e+03      S  S  Bc 
                               1.23698e+04     1.04502e+03      S  B  Sc 

                              -1.91649e+04     3.28216e+03      S  B  Bc 
                              -8.65042e+03    -3.24818e+03      B  B  Sc 

                   4-FOLD      0.00000e+00     0.00000e+00      Sc Sc Bc 
                               0.00000e+00     0.00000e+00      Sc Bc Bc 


 HYBRID M-S-B .    NORMAL     -3.38687e+02    -1.23904e+03      M  S  Bc 
                               5.92577e+02    -1.49064e+03      M  B  Sc 
                               2.38038e+02     1.49383e+03      S  B  Mc 

                   4-FOLD      0.00000e+00     0.00000e+00      Mc Sc Bc 


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 ***** CHROMATIC AB *****


 AXIAL                        -6.94640e-02     0.00000e+00      A  DV/V


 MAIN FIELD ...    NORMAL     -1.27217e-01    -2.53406e-01      M  DV/V


 SUB FIELD ....    NORMAL      9.69678e-01    -4.93101e-01      S  DV/V


 SHAPED BEAM ..    NORMAL     -2.81327e+00    -5.31761e-01      B  DV/V


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